Nanonewton force-controlled
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| Abstract: | As mechanical end-effectors, microgrippers enable the pick-transport-place of micrometer-sized objects, such as manipulation and positioning of biological cells in an aqueous environment. This paper reports on a monolithic MEMS-based microgripper with integrated force feedback along two axes and presents the first demonstration of force- controlled micro-grasping at the nanonewton force level. The system manipulates highly deformable biomaterials (porcine interstitial cells) in an aqueous environment using a microgripper that integrates a V-beam electrothermal microactuator and two capacitive force sensors, one for contact detection (force resolution: 38.5 nN) and the other for gripping force measurements (force resolution: 19.9 nN). The MEMS-based microgripper and the force control system experimentally demonstrate the capability of rapid contact detection and reliable force-controlled micrograsping to accommodate variations in size and mechanical properties of objects with a high reproducibility. © 2008 IOP Publishing Ltd. |
| Author:
| Kim, Keekyoung1 ; Liu, Xinyu1 ; Zhang, Yong1 ; Sun, Yu1 |
| Author Unit:
| 1 Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, Toronto, |
| Year: | 2008 |
| Source: | Journal of Micromechanics and Microengineering |
| Volume-OnPage: | 18 |
| Keyword: | |
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